The resulting ecr sources offer several advantages, the most important ones being. The results of the threedimensional 3d selfconsistent simulations of a 14 ghz minimumb electron cyclotron resonance ion source plasma obtained upon 1. Changing the microwave coupling strategy is desirable for several reasons related to the thruster lifetime and power range. In addition, this phenomenon is tighlty coupled to the way the microwave power is transferred to the plasma, and how the plasma is heated in the resonance zone. Since the early 1980s, following the awardwinning pioneering work done by dr. Plasmasolve plasma process and equipment simulation. Plasma software model lowtemperature plasma sources and. Identification of the ecr zone in the swisscase ecr. This contribution gives first a brief survey of the pertaining physics of microwave coupling, propagation, and wave damping in a magnetized plasma under ecr. Threedimensional simulation of an ecr plasma in a minimumb.
Once the input microwave frequency matches the electron cyclotron frequency, a resonating effect will heat up the massive number of electrons. The following simulation can be performed by combining and using each module of pegasus. Hybrid simulation of electron cyclotron resonance heating. Engineers and scientists use it to gain insight into the physics of discharges and gauge the performance of existing or potential designs. The mode of propagation of interest in this case is te mode. The employed model consists of the electromagnetic module for calculations of the static magnetic field, and the microwaveplasma module for electron density and energy calculations. For electron cyclotron resonance ecr plasmas, the pressure can be on the order. These plasma can be used for ion extraction applications for both ion and hall thrusters. The plasma module is tailormade to model and simulate lowtemperature plasma sources and systems. A generalpurpose threedimensional 3d simulation code ibsimu for charged particle optics with space charge is under development at jyfl. Kinetic plasma simulation of ion beam extraction from an. Plasma modeling refers to solving equations of motion that describe the state of a plasma. Imaging of ecr plasma by computer simulation request pdf. The problem of plasma behavior in numerous varieties of a minimumb magnetic trap where the plasma is heated under electron cyclotron resonance ecr conditions is the subject of numerical simulation studies.
The ecr3d codes are used for the simulation of ecr plasma by picmcc. In the present paper, argon plasma behaviour in a compact electron cyclotron resonance ecr plasma reactor is systematically studied by means of 2d. A threedimensional simulation software for charged. This includes the standard ecr reactor consisting of a short cylindrical solenoid which produces a divergent magnetic field to provide ecr conditions i. Wavemat largearea ecr plasma wavemat inc has introthe modification adds duced the m p d r 325i stepper motors, sensors ecr microwave plasma a n d a control module to source w i t h automatic, permit continuous, autoclosedloop tuning for promatic tuning of the plasma duction processing of large source to compensate for substrates. Through his multitude of good ideas, his mentorship of young researchers and students, and his guiding example of how research should be conducted, the group has made contributions that span all of plasma physics. Modeling of electron cyclotron resonance discharges journal. Learn how to use the plasma module to model and simulate lowtemperature. Nov 28, 2011 our professor assigned us an assignment on particle in cell simulation for his plasma engineering graduate class.
The simulation sequence for selfconsistent beam optics starts with an initial guess. Plasma and fed gas, radicals, other dissociative neutrals in ccpicp reactors. Vsim is designed to run computationally intensive electromagnetic, electrostatic, and plasma simulations in the presence of complex dielectric, magnetic, and metallic shapes. Ecr plasmas offer the option of high density very localized plasmas. Microwave ecr plasma etch chamber hitachi hightechs plasma chamber for conductor etch is based on an an ecr electron cyclotron resonance plasma source, able to generate a stable highdensity plasma at very low pressure software was used to define the configuration of ion thruster depending on the simulation results of ion behaviors and ion optics. The simulations run in tens of minutes to a few hours on standard computer platforms without the need of particle. Kinetic plasma simulation of ion beam extraction from an ecr ion. It is generally coupled with maxwells equations for electromagnetic fields or poissons equation for electrostatic fields. The plasma module is tailormade to model and simulate lowtemperature.
Plasma quest pquest is an ecr plasma etcher primarily used for etching gaas. The ucla plasma simulation group was founded when john dawson moved to ucla from princeton in 1973. After altering your code a bit, we basically moved and extended the wallbarrier to the right edge and changed a few parameters. Elliott, thin film cons ulting, longmont, co 80501 u. The objective of this work is to develop a 2d3v computer program to simulate the electron cyclotron resonance ecr plasma source. Plasma module application gallery examples comsol multiphysics. The central iron plug was removed so that the plasma would be visible. Semiconductor processing plasma processing and processing. When flowing plasmas interact with solid objects, a wake is formed.
Pdf threedimensional simulation of an ecr plasma in a. Simulation needed to study collective and kinetic effects, especially in the nonlinear development. Examples of such interactions include probes and other structures in the outer regions of magnetic fusion plasmas. Kinetic plasma simulation of ion beam extraction from an ecr. Surface geometry is represented by linear andor cubic spline segments. This is known as electron cyclotron resonance ecr, which occurs when a suitable high magnetic flux density is present along with the microwaves. Pegasus is software to simulate plasma behavior, and to simulate rarefied gas dynamics. In ecr plasma source, permanent magnets or solenoid coils are used to generate strong magnetic field. Microwave plasma for waste management comsol multiphysics.
The simulation proceeds with calculating particle trajectories and space charge density. Ion extraction from magnetized cusps has been demonstrated. Microwave plasma sources utilizing additionally electron resonance ecr for more efficient plasma production are becoming more and more interesting for various kinds of surface treatments, such as etching or thinfilm deposition. Vsim is a flexible, multiplatform, multiphysics simulation software tool. Abstract designing optimized ecr ion beam sources can be streamlined by the accurate simulation of beam.
Wavemat largearea ecr plasma source pdf free download. The current activities mostly center around software for studying high frequency plasma phenomenon for which electron kinetics is important. In the second section a few examples of ecr sources are discussed in more detail. Since the japanese semiconductor tool market is essential for u. Tergeo series plasma systems are laboratory tabletop plasma system. The model is used for a space charge simulation of ecr extraction system with an acceldecel extraction system from a plasma free surface in combined electric. We provide simulationguided optimization and design of ion sources for various applications. The module can perform analysis in all space dimensions 1d, 2d, and 3d. The calculation programs applied in this work are exactly the same which are used in for the computer simulation of an ecr minimumb trap plasma. At present, the ecr minimumb trap forms the principal part of the multicharge ion sources. Typically the starting point is solved from poissons equation with 0. Plasma quest ecr etcher, pquest stanford nanofabrication. It implements the electrostatic particle in cell espic method to model plasmas, as well as several fluid solvers for continuum problems. The simulation is performed using the microwave plasma interface to model wave heated discharges.
Three dimensional simulation of ion beam extraction from an. Computational studies for a multiplefrequency electron. The ucla plasma simulation group has an extensive history in developing and using pic software. The simulation code utilizes the following input parameters. Picfluidwave simulation of the plasma discharge in an ecr. Ecr electron cyclotron resonance plasma pie scientific. The research leading to these results has received funding from the european union h2020 program. Sep 04, 2007 this is a video of an ecr ion source plasma. Vsim for basic physics techx physics simulation software. We provide simulation guided optimization and design of ion sources for various applications. Geller proposed scaling for ecr ion sources 1987 plasma density n e f2 based on the assumption n e plasma source sustained through resonant heating of the electrons. Here, is a simple model to predict the spatiallyaveraged plasma characteristics of electron cyclotron resonance ecr reactors is presented. The computational domain is discretized into a rectilinear or body. Vsimbase provides 17 readymade simulation examples for problems such as radiation from a dipole, launching of plasma waves, and solving for the electrostatic potential for a given charge distribution.
The plasma modeled is characterized as non ecr plasma as it exists in atmospheric pressure. For all magnetic simulations of swisscase, the software tosca by vectorfields 4, a. Simkin, cobham technical services, vector fields software, oxford, ox5 1je, uk e. When electrons pass through the ecr surface, they are heated. As with all other vsim simulation packages, both data analysis and visualization functionality are integrated into vsim for basic physics. First, the static magnetic field, produced by three solenoids and a set of halbach permanent magnets, is simulated in a stationary study. Ecr plasma sources plasma science and technology laboratory. Fields scala software 2 simulation capabilities permit fast prediction of ion beam formation with automatically generated secondary charged particles from background gas. If you use our codes or our graphics both are ed, then please acknowledge ptsg in your publications and send us a copy of your journal articles or reports send to prof. This is backed by solid knowhow in plasma science and plasma kinetics of various gases and gas mixtures xe, ar, kr, o 2, n 2, h 2 o, no x, nh 3 and more ondemand as well as experience with various classes of plasma sources ic p, ccp, ecr, microwave.
The code was originally developed for designing a slitbeam plasma extraction and nanosecond scale chopping for pulsed neutron generator, but has been developed further and has been used for many applications. Abstract designing optimized ecr ion beam sources can be. Plasma and sputtering particles in magnetron sputtering equipments. Recently, a gridless ecr plasma thruster concept was recognized as a disruptive electric propulsion tech. In plasma extraction problems there is also an initial plasma volume with potential. Simkin, cobham technical services, vector fields software, oxford, ox5 1je, uk. Optimizing the plasma startup through ecr plasma pre. The simulation shows that the ecrt plasma discharge contains. Generate oxygen, argon, nitrogen, hydrogen, and ambient air plasma to ash photoresist, descum after patterning, remove hydrocarbon and other types of surface organic coatings or contaminations, change surface energy and improve the bonding strength.
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